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Figure 6
Line scan of test object showing scanning resolution system performance. Zone plate used for scanning, D = 133 µm and drN = 24 nm (Xradia ZP 24-133). |
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Figure 6
Line scan of test object showing scanning resolution system performance. Zone plate used for scanning, D = 133 µm and drN = 24 nm (Xradia ZP 24-133). |