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Figure 7
QEXAFS analysis of data taken in the reflection mode during in situ DC magnetron sputtering of a Cu layer on a glass substrate. Sputtering was performed in pure Ar at room temperature and the spectra were measured using an incident angle of 0.25°. (a) Simulation tool in T-REX for calculating reflection spectra before comparing them with the measured data. Measured spectra are displayed in red, the simulated ones in blue. By refining the calculations it is then possible to extract the layer composition, thickness and roughness as well as the substrate roughness in the case of very thin layers. (b) Extracted thickness and roughness of the Cu layer as a function of sputter time using the simulation tool.

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