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Figure 11
Diagram of stages of manufacturing of RZPAs. A variable groove depth for the two lens groups is realised by different local etching procedures (with masks) in step #4.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 20| Part 4| May 2013| Pages 522-530
doi:10.1107/S0909049513008613
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