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Figure 5
Diffraction efficiency of individual lenses for the low-energy (a) and the high-energy case (b). Dotted lines mark groove depths of 15 nm and 8.3 nm, respectively, selected as optimum settings for the current RZPA. |
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Figure 5
Diffraction efficiency of individual lenses for the low-energy (a) and the high-energy case (b). Dotted lines mark groove depths of 15 nm and 8.3 nm, respectively, selected as optimum settings for the current RZPA. |