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Figure 6
Si L2,3 XANES spectra for the N1 sample (implantation dose 6 × 1016 cm−2) formed on the (100) substrate registered at different grazing angles, and the difference spectrum for 60° and 90° registration. |
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Figure 6
Si L2,3 XANES spectra for the N1 sample (implantation dose 6 × 1016 cm−2) formed on the (100) substrate registered at different grazing angles, and the difference spectrum for 60° and 90° registration. |