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Figure 3
Energy power spectrum for different mirror(s) angular settings available in the mask–wafer plane. The lowest energy spectrum (red triangles) is not available to users due to the thicker Be window assembly. |
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Figure 3
Energy power spectrum for different mirror(s) angular settings available in the mask–wafer plane. The lowest energy spectrum (red triangles) is not available to users due to the thicker Be window assembly. |