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Figure 5
Horizontal intensity distribution of the beam in the mask–wafer plane of scanner 1 calculated using ray-tracing software and corresponding measured intensity.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 21| Part 1| November 2014| Pages 259-263
doi:10.1107/S1600577513024934
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