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Figure 11
Ray tracings at the exit slit plane for 1000 eV and 1000.011 eV. (a) No thermal deformation. (b) With thermal deformation. (c) As in (b) with cff correction. (d) As in (c) after aperturing the beam. |
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Figure 11
Ray tracings at the exit slit plane for 1000 eV and 1000.011 eV. (a) No thermal deformation. (b) With thermal deformation. (c) As in (b) with cff correction. (d) As in (c) after aperturing the beam. |