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Figure 8
Ray tracings at the exit slit plane for 200.00 eV and 200.002 eV (a) without thermal deformation on M1 and (b) with thermal deformation. |
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Figure 8
Ray tracings at the exit slit plane for 200.00 eV and 200.002 eV (a) without thermal deformation on M1 and (b) with thermal deformation. |