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Figure 1
Conceptual layout of the RF test cleaning chamber (G10Vx: ICP plasma source; SCPS: small traditional plasma source; OSP: optical spectrometer; QCM: quartz crystal monitor; CDG: capacitive diaphragm gauge; GV: gate valve; TMP: turbomolecular pump; EV: electro valve; RGA: residual gas analyzer; BP: backing pump).

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 21| Part 2| January 2014| Pages 300-314
doi:10.1107/S1600577513032402
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