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Figure 11
(a) UV/VIS spectra taken during an oxygen plasma cleaning run using the traditional CCP RF gun (black line, static mode, 0.03 mbar) as well as the GV10x ICP RF gun (red line, dynamic mode, 0.01 mbar) with 50 W RF power. The spectra have been normalized at the peak intensity at 559 nm. (b) UV/VIS spectra taken during the oxygen cleaning run in Fig. 6 ![]() ![]() |