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Figure 3
RGA time scan corresponding to the blue curve in Fig. 2(a) with a cleaning rate of 3.7 Å min−1, static gas supply mode. Blue vertical lines indicate the start/stop of the RF plasma. |
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Figure 3
RGA time scan corresponding to the blue curve in Fig. 2(a) with a cleaning rate of 3.7 Å min−1, static gas supply mode. Blue vertical lines indicate the start/stop of the RF plasma. |