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Figure 4
UV/VIS spectra taken during an oxygen plasma cleaning run using the small CCP traditional plasma source in static mode with 75 W RF power at 0.03 mbar process in 5 minute time intervals. |
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Figure 4
UV/VIS spectra taken during an oxygen plasma cleaning run using the small CCP traditional plasma source in static mode with 75 W RF power at 0.03 mbar process in 5 minute time intervals. |