Figure 4
Beam size at different positions along the beam as measured near the focus by the XBI system with the direct detector (magnification of 5: black dots; magnification of 6.5: red dots) and the wire scanner (diamonds). The inset compares beam size in the near-focus region as measured for a magnification of 6.5 using images reconstructed on the normal (55 µm × 55 µm pixels, red dots) and oversampled (27.5 µm × 27.5 µm pixels, blue dots) grid (see discussion). The solid lines correspond to the theoretically predicted values. |