Figure 7
Mechanical drawing of the grating assembly used in the AGM–AGS system. The plane grating is a Si substrate of thickness 10 mm coated with Au. Both ends of the grating are glued to a pair of copper bases and covering stainless-steel plates. Through six M4 screws on both ends, the grating is joined to a flexure-hinge bender made of 17-4 stainless steel. Two piezoelectric actuators are installed underneath the base, allowing us to control the grating profile. |