Figure 4
Simulated efficiency versus misalignment for the described four-level (top left) and six-level (top right) Fresnel zone plate stacks, with smallest zone width of 200 nm. The central peak is tolerant for small misalignments within one-third of the smallest zone width, while the focusing efficiency drops greatly for larger misalignments. The full width at half-maximum (FWHM) of the spot size can be seen below, showing similar tolerance for misalignment as the focusing efficiency. The oscillations of the spot size correspond to splitting into multiple spots. |