Figure 7
GISAXS scattering pattern of a line grating with a period length of 833 nm in parallel orientation of grating lines and incident beam, recorded at (a) 8 keV and (b) 3 keV (incident angle 0.8° in both cases). (c) Intensity profiles along the semicircles of the GISAXS patterns. (d) Close-up of the qy range from −0.11 nm−1 to −0.01 nm−1. |