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Figure 1
Transmission electron microscopy image of the STI etched silicon lines, with trenches filled with SiO2. The normal to the grating surface corresponds to the [001] crystallographic direction. The silicon periodic grating structure is fully covered by silicon oxide.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 21| Part 4| June 2014| Pages 774-783
doi:10.1107/S1600577514010108
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