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Figure 5
Reconstructed direct-space image of one period of the STI periodic silicon structure: reconstructed (a) amplitudes and (b) phases. The convergence is achieved by limiting the first vertical displacement derivatives locally in the ![]() ![]() |
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Figure 5
Reconstructed direct-space image of one period of the STI periodic silicon structure: reconstructed (a) amplitudes and (b) phases. The convergence is achieved by limiting the first vertical displacement derivatives locally in the ![]() ![]() |