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Figure 6
Full reconstructed direct-space image of one period of the STI periodic silicon structure: reconstructed (a) amplitudes and (b) phases. The image is obtained through the inversion of the prepared diffraction pattern from Fig. 3 ![]() |
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Figure 6
Full reconstructed direct-space image of one period of the STI periodic silicon structure: reconstructed (a) amplitudes and (b) phases. The image is obtained through the inversion of the prepared diffraction pattern from Fig. 3 ![]() |