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Figure 2
SEM images of the beam shaper condenser (a) and negative (b) and positive tone (c) phase shifters. The inset in (a) shows the 50 nm outermost zones of the beam shaper. The scale bars in (b) and (c) are 10 µm.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 21| Part 4| June 2014| Pages 790-794
doi:10.1107/S1600577514010388
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