Figure 2
Microscopic imaging performance. (a) Silica spheres of 500 nm diameter in the normal mode (the inset shows a line profile of silica). (b) Siemens Au star test pattern with innermost features of 50 nm pitch in the normal mode. (c) Whole image of a resolution test pattern (Xradia, X30-30-2) in large-field mode. Red and blue arrows show the two principal axes. |