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Figure 8
(a) Section of the tomogram perpendicular to the rotation axis. (b) Line profile indicated by a the yellow line in (a) showing 160 nm edge response using the 10–90% criteria. |
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Figure 8
(a) Section of the tomogram perpendicular to the rotation axis. (b) Line profile indicated by a the yellow line in (a) showing 160 nm edge response using the 10–90% criteria. |