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Figure 3
Scanning electron microscopy (SEM) images of SHSs showing microstructural (micropillars) and nanostructural (nanofibrils) features. (a) Nanopatterned pillared silicon surface. (b) PMMA surface with a hierarchical roughness composed of micropillars and nanofibrils. (c) Nanofibrillar PMMA surface. [Adapted from Limongi et al. (2013BB43) and Accardo et al. (2010BB4).] (d) Micro-fabrication process steps to develop micropatterned superhydrophobic PMMA surface. (I) Gold sputtering; (II) AZ5214 spin-coating; (III) resist baking, exposure, tone-inversion and development; (IV) gold etch; (V) DRIE plasma process; (VI) gold stripping and Teflon coating. [Adapted from Accardo et al. (2010BB4).]

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 21| Part 4| June 2014| Pages 643-653
doi:10.1107/S1600577514009849
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