Figure 6
Intensity of the reconstructed wavefields of lenses from the deposition PS6056 with a lamella thickness of (a) 10.5 µm and (b) 4.0 µm and the deposition PS6359 with a lamella thickness of (c) 10.5 µm in their respective focal planes. Lenses from PS6056 with a reduced lamella thickness show less volume diffraction effects and the individual lenses show their respective side lobes caused by the rate drift in the deposition process. For the PS6359 version of the lens the side lobes are mainly located on the focusing axes of the lenses and their intensity and shape improved compared with the previous ones. The sizes of the central peaks are 40 nm × 44 nm, 42 nm × 47 nm and 39 nm × 49 nm for (a), (b) and (c), respectively. |