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Figure 8
(a) Ptychographic reconstruction of the GLOBALFOUNDRIES integrated circuit sample and fluorescence maps of the (b) tantalum and (c) copper channels. Due to a malfunction of the trigger system about one-third of the far-field diffraction images could not be used for ptychographic reconstruction. The white rectangle in the reconstruction indicates the scanned region.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 21| Part 5| August 2014| Pages 1122-1127
doi:10.1107/S1600577514014556
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