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Figure 9
Stitched and rotated radiographs of the region of interest of the thinned chip acquired with the X-ray microscope Xradia NanoXCT-100 with the high-resolution 40× FZP. Copper circuit lines of the actual wiring layout are overlaid by some larger copper tiles. The area being investigated with ptychography is indicated with the dashed rectangle.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 21| Part 5| August 2014| Pages 1122-1127
doi:10.1107/S1600577514014556
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