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Figure 3
X-ray ptychographic tomography of a nanoporous glass sample. (a) Rendering of three-dimensional reconstruction with 22 nm resolution shows a gradient of the thickness of the Ta2O5 conformal coating in the axial direction. (b) Axial section with a clear differentiation between air, glass and the conformal coating. The scale bar is 1 µm. The inset in (b) corresponds to the 1.5 µm × 1.5 µm region indicated with a white rectangle.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 21| Part 5| August 2014| Pages 1011-1018
doi:10.1107/S1600577514015343
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