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Figure 2
Freestanding membrane scCVD diamond XBPM fabrication: (a) 3 µm-thick scCVD diamond membrane surrounded by a 55 µm-thick window frame, (b) after sputtering and lift-off lithography, showing the 200 nm-thick Al quadrant pattern, and (c) the processed detector bonded to its ceramic support ready for beamline testing.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 21| Part 6| October 2014| Pages 1217-1223
doi:10.1107/S1600577514016191
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