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Figure 1
(a) Schematic view of the instrument. Major components are enumerated: (1) capacitive sensors; (2) high-precision diamond-turned aluminium reference cylinder; (3) X–Y piezo positioner; (4) rotary stage under testing. (b) Arrangement of five Lion Precision CPL 190 capacitive displacement sensors (S1–S5) used to map rotational errors. Surface roughness (c) and line profile (d) of the aluminium reference cylinder acquired with a Zygo white beam interferometer.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 21| Part 6| October 2014| Pages 1367-1369
doi:10.1107/S160057751401618X
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