Tuning the phase transition of ZnO thin films through lithography: an integrated bottom-up and top-down processing

Malfatti, L.; Pinna, A.; Enzo, S.; Falcaro, P.; Marmiroli, B.; Innocenzi, P.

doi:10.1107/S1600577514024047

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Figure 5
XRD patterns at increasing heating temperatures for films exposed at different X-ray doses: (a) not exposed; (b) 89 J cm⁻²; (c) 178 J cm⁻² and (d) 356 J cm⁻². The asterisks (*) indicate the ZnO* crystalline phase (PDF #21-1486), the hash marks (#) indicate the intermediate f.c.c. crystalline phase and the hollow dots (o) indicate the wurtzite-like ZnO crystalline phase (PDF #80-0074).

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 22| Part 1| January 2015| Pages 165-171

https://doi.org/10.1107/S1600577514024047

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