Figure 2
(a) Scanning XRR measurement of Lp-a after the deposition of 600 s. (b) Scanning measurement of Lp-b during the first 400 s of deposition and (c) stationary measurement of Lp-a during the first 500 s of deposition. The mean value of the intensity is marked by the green line. The time axis corresponds to both curves. The grey boxes indicate time intervals of 100 s. At t = 0 s (red line) the plasma was ignited. The insets present zooms of highlighted regions for better visualization. |