Figure 2
An eightfold improvement to the slope error was achieved by repolishing a first-generation bimorph mirror to remove the junction effect. Before repolishing: 3.1 µrad r.m.s. (thick blue line). After repolishing: 0.4 µrad r.m.s. (thin red line). Comparable results have been achieved with all DLS repolished bimorphs. |