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Figure 9
Figure-error (upper panel) and slope-error (lower panel) improvements using a single iteration of the Inverse Matrix algorithm and metrology feedback from the Diamond-NOM. A slope error of ∼0.5 µrad r.m.s. was achieved for a range of ellipses.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 22| Part 1| January 2015| Pages 10-15
https://doi.org/10.1107/S1600577514020025
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