Figure 4
(a) SEM image of a test pattern used during synchrotron experiments. (b) Fluorescence image, (c) DPC image. Panels (d)–(f) show the same SEM, fluorescence and DPC images with red dots representing contours of the test pattern and directly superimposed on top of these images. (g) Drift during measurements derived from direct comparison between SEM and fluorescence images; squares represent the x-direction and circles the y-direction. |