Figure 3
Measured elliptical profile (red) compared with the ideal (blue) for a profile-etched mirror using a divergent (a) and a focused (c) ion beam, and the corresponding roughness map for a divergent (b) and a focused (d) ion beam. Sq and Sy in (b) and (d) are r.m.s. and peak-to-valley roughness numbers, respectively, with bars on the right in units of Å. |