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Figure 11
GIXD (αi = 0.1°), during growth at 740 K: exposure to 0.3 sccm of Si2H6 for 90 min. The intensity was integrated in a ROI of size of 232 (H) × 18 (V) pixels, corresponding to a detector acceptance of 20 (H) mrad × 1.5 (V) mrad. |
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Figure 11
GIXD (αi = 0.1°), during growth at 740 K: exposure to 0.3 sccm of Si2H6 for 90 min. The intensity was integrated in a ROI of size of 232 (H) × 18 (V) pixels, corresponding to a detector acceptance of 20 (H) mrad × 1.5 (V) mrad. |