view article

Figure 2
Photograph of the core of the INS set-up viewed from the direction opposite to the incoming X-ray beam (detector side). A small part of the heavy-duty diffractometer carrying the UHV chamber is visible on the left (white and steel parts), while most of the image is occupied by the UHV deposition chamber. The large exit Be window is clearly visible in the center of the picture. The slit/detector system for GIXD measurements is toward the top. The CVD gas injector is visible in the bottom right-hand corner below a Si MBE source. Other sources (such as a Omicron EFM4) can be distinguished. The RHEED gun is visible at the bottom, and the AES set-up in the top right (into a large bellows). The large ion pump is integrated into the diffractometer below the chamber, and the turbomolecular pumps are on the other side.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Follow J. Synchrotron Rad.
Sign up for e-alerts
Follow J. Synchrotron Rad. on Twitter
Follow us on facebook
Sign up for RSS feeds