Figure 3
Results of coherence measurement in the vertical direction for three exit slit openings Des at 500 eV. Black dots indicate measured data and dashed lines represent Gaussian fits. (a)–(c) Intensity profiles measured with scans of a 1.5 µm pinhole. (d)–(f) Modulus of the CCF . The gray shaded areas in (b) and (e) indicate the coherent part of the beam selected by the beam-defining 2.6 µm pinhole. The r.m.s. values σ of the beam size obtained from Gaussian fits, the coherence length lcoh, as well as the values of the global degree of coherence ζ determined from equation (4) are also shown. For the Gaussian fits we used the data points up to 9 µm in (e) and up to 7 µm in (f). |