Nanofocusing of X-ray free-electron lasers by grazing-incidence reflective optics

Yamauchi, K.; Yabashi, M.; Ohashi, H.; Koyama, T.; Ishikawa, T.

doi:10.1107/S1600577515005093

Journal of Synchrotron Radiation Journal of
Synchrotron Radiation

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Figure 3
Typical deterministic figuring process with elastic emission machining and optical-stitching interferometry. Three trials of deterministic figuring reached 2 nm (peak-to-valley) for nearly every position on the mirror.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 22| Part 3| May 2015| Pages 592-598

https://doi.org/10.1107/S1600577515005093

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