Figure 11
(a) Phase deviations of the −1-order diffracted wave with the first form of the layer placement error and ideal structures from a perfect converging spherical wave at the exit surface of the MLL. The black line corresponds to the ideal structures and the red line corresponds to the situation ∊ = 0.4. (b) Phase deviations of the −1-order diffracted wave with the second form of the layer placement error and ideal structures from a perfect converging spherical wave. The black line corresponds to the ideal structures and the red line correspond to the situation σ = 0.2 nm. |