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Figure 12
(a) Phase errors of the −1-order diffracted wave with the first form of the layer placement error, ∊ = 0.4. (b) Phase errors of the −1-order diffracted wave with the second form of the layer placement error, σ = 0.2 nm. The black line is the result obtained from the analytical expression πΔd/Δxn. The red line is obtained by calculating the phase difference between two −1-order diffracted waves, one with the layer placement error and the other with the ideal structure. Note that the phase deviation is presented as mod 2π in this figure in contrast to previous figures.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 22| Part 4| July 2015| Pages 936-945
https://doi.org/10.1107/S1600577515006487
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