A sub-micrometer resolution hard X-ray microprobe system of BL8C at Pohang Light Source

Sung, N.-E.; Lee, I.-J.; Lee, K.-S.; Jeong, S.-H.; Kang, S.-W.; Shin, Y.-B.

doi:10.1107/S1600577515014071

Journal of Synchrotron Radiation Journal of
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Figure 4
(a) Optical image of a test pattern (Siemens star). (b) 2D-XRF image obtained by measuring Au L_α fluorescence lines using the LEGe detector. It was measured using a 0.6 µm (V) × 0.6 µm (H) focused beam with 0.6 µm steps.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 22| Part 5| September 2015| Pages 1306-1311

https://doi.org/10.1107/S1600577515014071

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