Figure 5
PAD sensor diode leakage current versus bias voltage at room temperature. The lower curve was measured by the DC voltage supply to the full PAD array. In comparison, the upper set of five traces were measured for different individual pixels at the un-diced wafer level and then scaled (multiplied) by the number of total pixels. A typical per pixel leakage current is 10 to 20 nA with no evidence of breakdown at high voltage. |