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Figure 4
Uniformity of the B4C film layer thickness. The coating was deposited on 70 sapphire substrates, which are evenly disributed over the available area of 1500 mm (tangential) by 120 mm (sagittal). The coloured z-scale is the normalized layer thickness difference given by (t−tm)/tm, where tm is the mean layer thickness along the tangential direction (16 positions, y = 60 mm) and t is the measured thickness at 70 positions within the mirror area (x, y). Contour lines have been interpolated in order to demonstrate the changes. The values of normalized difference decrease towards the outer regions of the area.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 23| Part 1| January 2016| Pages 50-58
doi:10.1107/S1600577515020901
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