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Figure 5
Ratio (m) of the difference in thickness to difference in y position as a function of the inclination angle (insert: geometrical dimensions between the sputtering source and substrate).

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 23| Part 1| January 2016| Pages 50-58
doi:10.1107/S1600577515020901
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