Figure 3
Left: compact Hartmann sensor. A manual operating stage allows for lateral movement in the x and y direction of ±12.5 mm and ±10° tip/tilt to align the sensor to the beam. The sensor is mounted on a tripod and connected to the beamline or user experiment using a CF40 bellow. Right: inner part of the Hartmann sensor with the Hartmann plate holder. In the inset an optical microscopic image (magnification 10×) of part of the nickel Hartmann plate with electroformed holes is shown. |