Figure 12
Cr/C-multilayer reflectivity curves (θ-2θ scans) for different photon energies in the XUV-range in first, second and third diffraction order. All curves start at R = 0.5 at θ = 0° which is a hint for a perfect alignment with the tripod stage. Multilayer parameters: Cr/C with 20 periods and a period thickness of 5.95 nm. |