Figure 13
Surface profile of the adhesion film on a substrate with a parabolic-shaped feature (1). The width of the feature was 80 nm, and its maximal height was 1.5 nm. Modeling was performed for different ratios Pdes/Pdif = 1/3 (2), 1/1 (3) and 3/1 (4). Parameter = 0.25 so that P0 = 17.3%. The cube size was a = 0.25 nm. The grazing angle of the incident beam was 3°. When calculating different films, the same sets of random numbers {j} and {p} were used. The dotted curve shows profile 4 after averaging over 10 nm intervals along the X-axis. |