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Figure 14
Profile of the adhesion layer grown on the substrate with the parabolic feature on its surface. The maximal height of the feature was 0.5 nm (1), 1 nm (2), 1.5 nm (3) and 2.5 nm (4), while the 80 nm feature length was fixed. The profiles were averaged over 10 nm intervals along the X-axis. The growth parameters are: Pdes/Pdif = 3, ![]() |